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Vacuum packaged MEMS piezoelectric vibration energy harvesters

dc.contributor.authorElfrink, Rene
dc.contributor.authorRenaud, Michael
dc.contributor.authorKamel, Talal
dc.contributor.authorde Nooijer, Christine
dc.contributor.authorJambunathan, Madhusudhanan
dc.contributor.authorGoedbloed, Martijn
dc.contributor.authorHohlfeld, Dennis
dc.contributor.authorMatova, Svetla
dc.contributor.authorvan Schaijk, Rob
dc.date.accessioned2021-10-17T22:05:20Z
dc.date.available2021-10-17T22:05:20Z
dc.date.issued2009
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/15270
dc.sourceIIOimport
dc.titleVacuum packaged MEMS piezoelectric vibration energy harvesters
dc.typeProceedings paper
dc.contributor.imecauthorElfrink, Rene
dc.contributor.imecauthorde Nooijer, Christine
dc.source.peerreviewno
dc.source.conferencePowerMEMS - 9th International Workshop on Micro and Nanotechnology for Power Generation and Energy Conversion Applications
dc.source.conferencedate1/12/2009
dc.source.conferencelocationWashington, D.C. USA
imec.availabilityPublished - imec


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