Authors

Eneman, Geert; Simoen, Eddy; Yang, Rui; De Jaeger, Brice; Wang, Gang; Mitard, Jerome; Hellings, Geert; Brunco, David; Loo, Roger; De Meyer, Kristin; Caymax, Matty; Claeys, Cor; Meuris, Marc; Heyns, Marc

Conference

Advanced Gate Stack, Source/Drain, and Channel Engineering for Si-band CMOS. 5: New Material, Processing, and Equipment

Title

Defects, junction leakage and electrical performance of Ge pFET devices

Publication type

Proceedings paper