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Effects of silica sources on nanoporous organosilicate films with tetraalkylammonium cations

dc.contributor.authorEslava Fernandez, Salvador
dc.contributor.authorUrrutia Fernandez de Retana, Jone
dc.contributor.authorBusawon, Abheesh Neervan
dc.contributor.authorBaklanov, Mikhaïl
dc.contributor.authorIacopi, Francesca
dc.contributor.authorMaex, Karen
dc.contributor.authorKirschhock, Christine E.A.
dc.contributor.authorMartens, Johan
dc.date.accessioned2021-10-17T22:08:35Z
dc.date.available2021-10-17T22:08:35Z
dc.date.issued2009
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/15285
dc.sourceIIOimport
dc.titleEffects of silica sources on nanoporous organosilicate films with tetraalkylammonium cations
dc.typeProceedings paper
dc.contributor.imecauthorMaex, Karen
dc.source.peerreviewyes
dc.source.beginpage1156-D03-01
dc.source.conferenceMaterials, Processes and Reliability for Advanced Interconnects for Micro- and Nanoelectronics
dc.source.conferencedate13/04/2009
dc.source.conferencelocationSan Francisco, CA USA
imec.availabilityPublished - imec
imec.internalnotesMRS Symposium Proceedings; Vol. 1156


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