Authors

Eslava Fernandez, Salvador; Urrutia Fernandez de Retana, Jone; Busawon, Abheesh Neervan; Baklanov, Mikhaïl; Iacopi, Francesca; Maex, Karen; Kirschhock, Christine E.A.; Martens, Johan

Conference

Materials, Processes and Reliability for Advanced Interconnects for Micro- and Nanoelectronics

Title

Effects of silica sources on nanoporous organosilicate films with tetraalkylammonium cations

Publication type

Proceedings paper