Publication:
Effects of silica sources on nanoporous organosilicate films with tetraalkylammonium cations
Date
| dc.contributor.author | Eslava Fernandez, Salvador | |
| dc.contributor.author | Urrutia Fernandez de Retana, Jone | |
| dc.contributor.author | Busawon, Abheesh Neervan | |
| dc.contributor.author | Baklanov, Mikhaïl | |
| dc.contributor.author | Iacopi, Francesca | |
| dc.contributor.author | Maex, Karen | |
| dc.contributor.author | Kirschhock, Christine E.A. | |
| dc.contributor.author | Martens, Johan | |
| dc.contributor.imecauthor | Maex, Karen | |
| dc.date.accessioned | 2021-10-17T22:08:35Z | |
| dc.date.available | 2021-10-17T22:08:35Z | |
| dc.date.issued | 2009 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/15285 | |
| dc.source.beginpage | 1156-D03-01 | |
| dc.source.conference | Materials, Processes and Reliability for Advanced Interconnects for Micro- and Nanoelectronics | |
| dc.source.conferencedate | 13/04/2009 | |
| dc.source.conferencelocation | San Francisco, CA USA | |
| dc.title | Effects of silica sources on nanoporous organosilicate films with tetraalkylammonium cations | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
| Files | ||
| Publication available in collections: |