Two-dimensional carrier profiling with sub-nm resolution using SSRM: from basic concept to TCAD calibration and device tuning
dc.contributor.author | Eyben, Pierre | |
dc.contributor.author | Vemula, Sri Charan | |
dc.contributor.author | Noda, T. | |
dc.contributor.author | Vandervorst, Wilfried | |
dc.date.accessioned | 2021-10-17T22:09:39Z | |
dc.date.available | 2021-10-17T22:09:39Z | |
dc.date.issued | 2009 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/15290 | |
dc.source | IIOimport | |
dc.title | Two-dimensional carrier profiling with sub-nm resolution using SSRM: from basic concept to TCAD calibration and device tuning | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Eyben, Pierre | |
dc.contributor.imecauthor | Vandervorst, Wilfried | |
dc.source.peerreview | no | |
dc.source.conference | 9th International Workshop on Junction Technology - IWJT | |
dc.source.conferencedate | 11/06/2009 | |
dc.source.conferencelocation | Kyoto Japan | |
imec.availability | Published - imec |
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