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Two-dimensional carrier profiling with sub-nm resolution using SSRM: from basic concept to TCAD calibration and device tuning

dc.contributor.authorEyben, Pierre
dc.contributor.authorVemula, Sri Charan
dc.contributor.authorNoda, T.
dc.contributor.authorVandervorst, Wilfried
dc.date.accessioned2021-10-17T22:09:39Z
dc.date.available2021-10-17T22:09:39Z
dc.date.issued2009
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/15290
dc.sourceIIOimport
dc.titleTwo-dimensional carrier profiling with sub-nm resolution using SSRM: from basic concept to TCAD calibration and device tuning
dc.typeProceedings paper
dc.contributor.imecauthorEyben, Pierre
dc.contributor.imecauthorVandervorst, Wilfried
dc.source.peerreviewno
dc.source.conference9th International Workshop on Junction Technology - IWJT
dc.source.conferencedate11/06/2009
dc.source.conferencelocationKyoto Japan
imec.availabilityPublished - imec


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