Show simple item record

Strain analysis of Si1-xGex embedded source/drain transistors by nano-beam diffraction

dc.contributor.authorFavia, Paola
dc.contributor.authorBargallo Gonzalez, Mireia
dc.contributor.authorSimoen, Eddy
dc.contributor.authorVerheyen, Peter
dc.contributor.authorBender, Hugo
dc.date.accessioned2021-10-17T22:11:20Z
dc.date.available2021-10-17T22:11:20Z
dc.date.issued2009
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/15298
dc.sourceIIOimport
dc.titleStrain analysis of Si1-xGex embedded source/drain transistors by nano-beam diffraction
dc.typeMeeting abstract
dc.contributor.imecauthorFavia, Paola
dc.contributor.imecauthorSimoen, Eddy
dc.contributor.imecauthorVerheyen, Peter
dc.contributor.imecauthorBender, Hugo
dc.contributor.orcidimecFavia, Paola::0000-0002-1019-3497
dc.contributor.orcidimecSimoen, Eddy::0000-0002-5218-4046
dc.source.peerreviewno
dc.source.conferenceMicroscopy of Semiconducting Materials Conference - MSM XVI
dc.source.conferencedate17/03/2009
dc.source.conferencelocationOxford UK
imec.availabilityPublished - imec


Files in this item

FilesSizeFormatView

There are no files associated with this item.

This item appears in the following collection(s)

Show simple item record