Strain analysis of Si1-xGex embedded source/drain transistors by nano-beam diffraction

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Authors
Favia, Paola; Bargallo Gonzalez, Mireia; Simoen, Eddy; Verheyen, Peter; Bender, Hugo
Conference
Microscopy of Semiconducting Materials Conference - MSM XVI
Title
Strain analysis of Si1-xGex embedded source/drain transistors by nano-beam diffraction
Publication type
Meeting abstract
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