Publication:
Strain analysis of Si1-xGex embedded source/drain transistors by nano-beam diffraction
Date
Loading...
Journal
Abstract
Description
Metrics
Views
1834 since deposited on 2021-10-17
Acq. date: 2026-01-05
Citations
Metrics
Views
1834 since deposited on 2021-10-17
Acq. date: 2026-01-05
Citations