Publication:
Double patterning lithography for 32 nm: critical dimensions uniformity and overlay control considerations
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1984 since deposited on 2021-10-17
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Acq. date: 2025-12-08
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Metrics
Views
1984 since deposited on 2021-10-17
3last month
3last week
Acq. date: 2025-12-08
Citations