Show simple item record

EUV lithography implementation on contact and metal interconnect level of a 22nm node 0.099um2 6T-SRAM cell

dc.contributor.authorGoethals, Mieke
dc.contributor.authorDemuynck, Steven
dc.contributor.authorVan Roey, Frieda
dc.contributor.authorBaudemprez, Bart
dc.contributor.authorHermans, Jan
dc.contributor.authorHuffman, Craig
dc.contributor.authorLazzarino, Frederic
dc.contributor.authorPollentier, Ivan
dc.contributor.authorHendrickx, Eric
dc.contributor.authorJonckheere, Rik
dc.contributor.authorVerhaegen, Staf
dc.contributor.authorVeloso, Anabela
dc.contributor.authorVandenberghe, Geert
dc.contributor.authorRonse, Kurt
dc.date.accessioned2021-10-17T22:25:16Z
dc.date.available2021-10-17T22:25:16Z
dc.date.issued2009
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/15360
dc.sourceIIOimport
dc.titleEUV lithography implementation on contact and metal interconnect level of a 22nm node 0.099um2 6T-SRAM cell
dc.typeProceedings paper
dc.contributor.imecauthorDemuynck, Steven
dc.contributor.imecauthorVan Roey, Frieda
dc.contributor.imecauthorBaudemprez, Bart
dc.contributor.imecauthorHermans, Jan
dc.contributor.imecauthorLazzarino, Frederic
dc.contributor.imecauthorPollentier, Ivan
dc.contributor.imecauthorHendrickx, Eric
dc.contributor.imecauthorJonckheere, Rik
dc.contributor.imecauthorVeloso, Anabela
dc.contributor.imecauthorVandenberghe, Geert
dc.contributor.imecauthorRonse, Kurt
dc.contributor.orcidimecHermans, Jan::0000-0003-1249-8902
dc.contributor.orcidimecLazzarino, Frederic::0000-0001-7961-9727
dc.contributor.orcidimecPollentier, Ivan::0000-0002-4266-6500
dc.contributor.orcidimecJonckheere, Rik::0000-0003-2211-9443
dc.contributor.orcidimecRonse, Kurt::0000-0003-0803-4267
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.conferenceInternational Symposium on Extreme Ultraviolet Lithography
dc.source.conferencedate18/10/2009
dc.source.conferencelocationPrague Czech Republic
imec.availabilityPublished - open access
imec.internalnotese-proceedings Sematech-website


Files in this item

Thumbnail
Name:
18872.pdf
Size:
5.269Mb
Format:
PDF
View/open

This item appears in the following collection(s)

Show simple item record