Publication:

EUV lithography implementation on contact and metal interconnect level of a 22nm node 0.099um2 6T-SRAM cell

Date

2009

Proceedings Paper

Simple item page Full metadata Statistics

Files

18872.pdf 5.27 MB

Author(s)

Goethals, Mieke

;

Demuynck, Steven

;

Van Roey, Frieda

;

Baudemprez, Bart

;

;

;

Lazzarino, Frederic

;

Pollentier, Ivan

;

Hendrickx, Eric

;

Jonckheere, Rik

;

Verhaegen, Staf

;

Veloso, Anabela

;

Vandenberghe, Geert

;

Metrics

1903 since deposited on 2021-10-17

1last month

Acq. date: 2025-12-10