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Evaluation of the electrical properties, piezoresistivity and noise of poly-SiGe for MEMS-above-CMOS applications

dc.contributor.authorGonzalez, Pilar
dc.contributor.authorLenci, Silvia
dc.contributor.authorHaspeslagh, Luc
dc.contributor.authorDe Meyer, Kristin
dc.contributor.authorWitvrouw, Ann
dc.date.accessioned2021-10-17T22:27:44Z
dc.date.available2021-10-17T22:27:44Z
dc.date.issued2009
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/15371
dc.sourceIIOimport
dc.titleEvaluation of the electrical properties, piezoresistivity and noise of poly-SiGe for MEMS-above-CMOS applications
dc.typeProceedings paper
dc.contributor.imecauthorGonzalez, Pilar
dc.contributor.imecauthorLenci, Silvia
dc.contributor.imecauthorHaspeslagh, Luc
dc.contributor.imecauthorDe Meyer, Kristin
dc.contributor.orcidimecHaspeslagh, Luc::0000-0003-3561-3387
dc.source.peerreviewno
dc.source.beginpage1153-A19-04
dc.source.conferenceAmorphous and Polycrystalline Thin-Film Silicon Science and Technology - 2009
dc.source.conferencedate13/04/2009
dc.source.conferencelocationSan Francisco, CA USA
imec.availabilityPublished - imec
imec.internalnotesMRS Symposium Proceedings; Vol. 1153


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