Authors

Gonzalez, Pilar; Lenci, Silvia; Haspeslagh, Luc; De Meyer, Kristin; Witvrouw, Ann

Conference

Amorphous and Polycrystalline Thin-Film Silicon Science and Technology - 2009

Title

Evaluation of the electrical properties, piezoresistivity and noise of poly-SiGe for MEMS-above-CMOS applications

Publication type

Proceedings paper