Publication:
Evaluation of the electrical properties, piezoresistivity and noise of poly-SiGe for MEMS-above-CMOS applications
Date
| dc.contributor.author | Gonzalez, Pilar | |
| dc.contributor.author | Lenci, Silvia | |
| dc.contributor.author | Haspeslagh, Luc | |
| dc.contributor.author | De Meyer, Kristin | |
| dc.contributor.author | Witvrouw, Ann | |
| dc.contributor.imecauthor | Gonzalez, Pilar | |
| dc.contributor.imecauthor | Lenci, Silvia | |
| dc.contributor.imecauthor | Haspeslagh, Luc | |
| dc.contributor.imecauthor | De Meyer, Kristin | |
| dc.contributor.orcidimec | Haspeslagh, Luc::0000-0003-3561-3387 | |
| dc.date.accessioned | 2021-10-17T22:27:44Z | |
| dc.date.available | 2021-10-17T22:27:44Z | |
| dc.date.issued | 2009 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/15371 | |
| dc.source.beginpage | 1153-A19-04 | |
| dc.source.conference | Amorphous and Polycrystalline Thin-Film Silicon Science and Technology - 2009 | |
| dc.source.conferencedate | 13/04/2009 | |
| dc.source.conferencelocation | San Francisco, CA USA | |
| dc.title | Evaluation of the electrical properties, piezoresistivity and noise of poly-SiGe for MEMS-above-CMOS applications | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
| Files | ||
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