Publication:
Evaluation of the electrical properties, piezoresistivity and noise of poly-SiGe for MEMS-above-CMOS applications
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1952 since deposited on 2021-10-17
1last month
Acq. date: 2026-10-13
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Statistics
Views
1952 since deposited on 2021-10-17
1last month
Acq. date: 2026-10-13
Citations