Publication:
Evaluation of the electrical properties, piezoresistivity and noise of poly-SiGe for MEMS-above-CMOS applications
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1950 since deposited on 2021-10-17
4last month
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Acq. date: 2026-04-25
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Statistics
Views
1950 since deposited on 2021-10-17
4last month
1last week
Acq. date: 2026-04-25
Citations