An insight into the parasitic capacitances of SOI and bulk FinFET devices

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Authors
Griffoni, Alessio; Thijs, Steven; Linten, Dimitri; Scholz, Mirko; Groeseneken, Guido; Meneghesso, Gaudenzio
Conference
18th European Workshop on Heterostructure Technology - HETECH
Title
An insight into the parasitic capacitances of SOI and bulk FinFET devices
Publication type
Proceedings paper
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