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Next generation FinFET devices in bulk silicon technology and their benefits for ESD robustness
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Authors
Griffoni, Alessio
;
Thijs, Steven
;
Russ, Christian
;
Tremouilles, David
;
Linten, Dimitri
;
Scholz, Mirko
;
Collaert, Nadine
;
Witters, Liesbeth
;
Meneghesso, Gaudenzio
;
Groeseneken, Guido
Conference
RCJ Symposium
Title
Next generation FinFET devices in bulk silicon technology and their benefits for ESD robustness
Publication type
Proceedings paper
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