Damage cluster analysis of patterned wafers during solvent spray cleaning

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Authors
Halder, Sandip; Wostyn, Kurt; Andreas, Michael; Wada, Masayuki; Brems, Steven; Bearda, Twan; Pacco, Antoine; Kenis, Karine; Vos, Rita; Mertens, Paul
Conference
Cleaning and Surface Conditioning Technology in Semiconductor Device Manufacturing 11
Title
Damage cluster analysis of patterned wafers during solvent spray cleaning
Publication type
Proceedings paper
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