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Backside analysis of ultra-thin film stacks in microelectronics technology using X-ray photoelectron spectroscopy
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Authors
Hantschel, Thomas
;
Demeulemeester, Cindy
;
Suderie, Arnaud
;
Lacave, Thomas
;
Conard, Thierry
;
Vandervorst, Wilfried
Conference
Electron Crystallography for Materials Research and Quantitative Characterization of Nanostructured Materials
Title
Backside analysis of ultra-thin film stacks in microelectronics technology using X-ray photoelectron spectroscopy
Publication type
Proceedings paper
Embargo date
9999-12-31
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