Authors

Hantschel, Thomas; Schulz, Volker; Schulze, Andreas; Angeletti, Esteban; Guder, Firat; Schmidt, Volker; Senz, Stephan; Eyben, Pierre; Vandervorst, Wilfried

Conference

Semiconductor Nanowires - Growth,Size-Dependent Properties, and Applications

Title

Characterizing the two-dimensional doping concentration inside silicon-nanowires using scanning spreading resistance microscopy

Publication type

Proceedings paper