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Influence of gasification on electro-acoustical and cleaning performance of a 1 MHz nozzle system in megasonic cleaning

dc.contributor.authorHauptmann, Marc
dc.contributor.authorBrems, Steven
dc.contributor.authorCamerotto, Elisabeth
dc.contributor.authorZijlstra, Aaldert
dc.contributor.authorDoumen, Geert
dc.contributor.authorBearda, Twan
dc.contributor.authorMertens, Paul
dc.contributor.authorLauriks, Walter
dc.date.accessioned2021-10-17T22:45:59Z
dc.date.available2021-10-17T22:45:59Z
dc.date.issued2009
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/15446
dc.sourceIIOimport
dc.titleInfluence of gasification on electro-acoustical and cleaning performance of a 1 MHz nozzle system in megasonic cleaning
dc.typeMeeting abstract
dc.contributor.imecauthorBrems, Steven
dc.contributor.imecauthorCamerotto, Elisabeth
dc.contributor.imecauthorDoumen, Geert
dc.contributor.imecauthorMertens, Paul
dc.contributor.orcidimecBrems, Steven::0000-0002-0282-8528
dc.source.peerreviewno
dc.source.conference35th International Conference on Micro & Nano Engineering - MNE
dc.source.conferencedate28/09/2009
dc.source.conferencelocationGent Belgium
imec.availabilityPublished - imec


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