Publication:

Fabrication technology for silicon-based microprobe arrays used in acute and sub-chronic neural recording

Date

2009
Journal article
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19933.pdf 1.5 MB

Author(s)

Herwik, S.
;
Kisban, S.
;
Aarts, Arno  
;
Seidl, K.
;
Girardeau, G.
;
Benchenane, K.
;
Zugaro, M.B.
;
Wiener, S.I.
;
Paul, O.
;
Pereira Neves, Hercules
;
Ruther, P.

Journal

Journal of Micromechanics and Microengineering

Abstract

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