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Fabrication technology for silicon-based microprobe arrays used in acute and sub-chronic neural recording
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Fabrication technology for silicon-based microprobe arrays used in acute and sub-chronic neural recording
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Date
2009
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19933.pdf
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Herwik, S.
;
Kisban, S.
;
Aarts, Arno
;
Seidl, K.
;
Girardeau, G.
;
Benchenane, K.
;
Zugaro, M.B.
;
Wiener, S.I.
;
Paul, O.
;
Pereira Neves, Hercules
;
Ruther, P.
Journal
Journal of Micromechanics and Microengineering
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since deposited on 2021-10-17
Acq. date: 2025-12-10
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2054
since deposited on 2021-10-17
1
last month
Acq. date: 2025-12-10
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