Authors

Heyns, Marc; Bellenger, Florence; Brammertz, Guy; Caymax, Matty; De Jaeger, Brice; Delabie, Annelies; Eneman, Geert; Houssa, Michel; Lin, Dennis; Martens, Koen; Merckling, Clement; Meuris, Marc; Mitard, Jerome; Penaud, Julien; Pourtois, Geoffrey; Scarrozza, Marco; Simoen, Eddy; Sioncke, Sonja; Van Elshocht, Sven; Wang, Wei-E

Conference

High Dielectric Constant Materials and Gate Stacks 7

Title

High-k dielectrics and interface passivation for Ge and III/V devices on silicon for advanced CMOS

Publication type

Proceedings paper

Embargo date

9999-12-31