dc.contributor.author | Heyns, Marc | |
dc.contributor.author | Bellenger, Florence | |
dc.contributor.author | Brammertz, Guy | |
dc.contributor.author | Caymax, Matty | |
dc.contributor.author | De Jaeger, Brice | |
dc.contributor.author | Delabie, Annelies | |
dc.contributor.author | Eneman, Geert | |
dc.contributor.author | Houssa, Michel | |
dc.contributor.author | Lin, Dennis | |
dc.contributor.author | Martens, Koen | |
dc.contributor.author | Merckling, Clement | |
dc.contributor.author | Meuris, Marc | |
dc.contributor.author | Mitard, Jerome | |
dc.contributor.author | Penaud, Julien | |
dc.contributor.author | Pourtois, Geoffrey | |
dc.contributor.author | Scarrozza, Marco | |
dc.contributor.author | Simoen, Eddy | |
dc.contributor.author | Sioncke, Sonja | |
dc.contributor.author | Van Elshocht, Sven | |
dc.contributor.author | Wang, Wei-E | |
dc.date.accessioned | 2021-10-17T22:54:25Z | |
dc.date.available | 2021-10-17T22:54:25Z | |
dc.date.issued | 2009 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/15476 | |
dc.source | IIOimport | |
dc.title | High-k dielectrics and interface passivation for Ge and III/V devices on silicon for advanced CMOS | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Heyns, Marc | |
dc.contributor.imecauthor | Brammertz, Guy | |
dc.contributor.imecauthor | Caymax, Matty | |
dc.contributor.imecauthor | De Jaeger, Brice | |
dc.contributor.imecauthor | Delabie, Annelies | |
dc.contributor.imecauthor | Eneman, Geert | |
dc.contributor.imecauthor | Houssa, Michel | |
dc.contributor.imecauthor | Lin, Dennis | |
dc.contributor.imecauthor | Martens, Koen | |
dc.contributor.imecauthor | Merckling, Clement | |
dc.contributor.imecauthor | Meuris, Marc | |
dc.contributor.imecauthor | Mitard, Jerome | |
dc.contributor.imecauthor | Pourtois, Geoffrey | |
dc.contributor.imecauthor | Simoen, Eddy | |
dc.contributor.imecauthor | Van Elshocht, Sven | |
dc.contributor.orcidimec | Brammertz, Guy::0000-0003-1404-7339 | |
dc.contributor.orcidimec | De Jaeger, Brice::0000-0001-8804-7556 | |
dc.contributor.orcidimec | Eneman, Geert::0000-0002-5849-3384 | |
dc.contributor.orcidimec | Houssa, Michel::0000-0003-1844-3515 | |
dc.contributor.orcidimec | Martens, Koen::0000-0001-7135-5536 | |
dc.contributor.orcidimec | Merckling, Clement::0000-0003-3084-2543 | |
dc.contributor.orcidimec | Meuris, Marc::0000-0002-9580-6810 | |
dc.contributor.orcidimec | Mitard, Jerome::0000-0002-7422-079X | |
dc.contributor.orcidimec | Pourtois, Geoffrey::0000-0003-2597-8534 | |
dc.contributor.orcidimec | Simoen, Eddy::0000-0002-5218-4046 | |
dc.contributor.orcidimec | Van Elshocht, Sven::0000-0002-6512-1909 | |
dc.date.embargo | 9999-12-31 | |
dc.source.peerreview | no | |
dc.source.beginpage | 51 | |
dc.source.endpage | 65 | |
dc.source.conference | High Dielectric Constant Materials and Gate Stacks 7 | |
dc.source.conferencedate | 4/10/2009 | |
dc.source.conferencelocation | Vienna Austria | |
imec.availability | Published - open access | |
imec.internalnotes | ECS Transactions; Vol. 25; Issue 6 | |