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Comparison of electrical measurements with structural analysis of thin high-k hafnium-based films
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Authors
Hourdakis, E.
;
Theodoropoulou, M.
;
Nassiopoulou, A.G.
;
Parisini, A.
;
Reading, M.A.
;
van den Berg, J.A.
;
Conard, Thierry
;
De Gendt, Stefan
Conference
Analytical Techniques for Semiconductor Materials and Process Characterization 6 - ALTECH
Title
Comparison of electrical measurements with structural analysis of thin high-k hafnium-based films
Publication type
Proceedings paper
Embargo date
9999-12-31
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