Negative bias temperature instabilities in high-k gate dielectrics

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Authors
Houssa, Michel; Aoulaiche, Marc; De Gendt, Stefan; Groeseneken, Guido; Heyns, Marc
Book
Defects in Microelectronic Materials and Devices
Title
Negative bias temperature instabilities in high-k gate dielectrics
Publication type
Book chapter
Embargo date
9999-12-31
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