Authors

Houssa, Michel; Pourtois, Geoffrey; Mitard, Jerome; Delabie, Annelies; Bellenger, Florence; Meuris, Marc; Caymax, Matty; Heyns, Marc; Afanasiev, Valeri; Stesmans, Andre

Conference

MRS Spring Meeting symposium C: CMOS Gate Stack Scaling - Materials, Interfaces, and Reliability Implications

Title

Progress towards passivation of Ge/high-k interfaces

Publication type

Meeting abstract