In-situ studies of point defect reactions in silicon by high flux electron iIrradiation in a high voltage transmission electron microscope
dc.contributor.author | Fedina, L. | |
dc.contributor.author | Van Landuyt, J. | |
dc.contributor.author | Vanhellemont, Jan | |
dc.contributor.author | Romano, Albert | |
dc.contributor.author | Aseev, A. | |
dc.date.accessioned | 2021-09-29T12:41:15Z | |
dc.date.available | 2021-09-29T12:41:15Z | |
dc.date.issued | 1994 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/154 | |
dc.source | IIOimport | |
dc.title | In-situ studies of point defect reactions in silicon by high flux electron iIrradiation in a high voltage transmission electron microscope | |
dc.type | Proceedings paper | |
dc.date.embargo | 9999-12-31 | |
dc.source.peerreview | no | |
dc.source.beginpage | 83 | |
dc.source.endpage | 85 | |
dc.source.conference | Joint Meeting of the Belgian and Dutch Societies for Electron Microscopy | |
dc.source.conferencedate | 1/12/1994 | |
dc.source.conferencelocation | Arnhem The Netherlands | |
imec.availability | Published - open access |