Authors

Ishimoto, Toru; Sekiguchi, Kohei; Hasegawa, Norio; Watanabe, Kenji; Laidler, David; Cheng, Shaunee

Conference

Metrology, Inspection and Process Control for Microlithography XXIII

Title

A practical application of multiple parameters profile characterization (MPPC) using CD-SEM on production wafers using Hyper-NA lithography

Publication type

Proceedings paper

Embargo date

9999-12-31