1.9 nm wide ultra-high aspect-ratio bulk-Si FinFETs

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Authors
Jovanovic, VladimirFaculty of Electrical; Poljak, Mirko; Suligoj, Tomislav; Civale, Yann; Nanver, Lis
Conference
67th Device Research Conference
Title
1.9 nm wide ultra-high aspect-ratio bulk-Si FinFETs
Publication type
Proceedings paper
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