Authors

Kaczer, Ben; Veloso, Anabela; Aoulaiche, Marc; Groeseneken, Guido

ISSN

0167-9317

Issue

7_9

Journal

Microelectronic Engineering

Volume

86

Title

Significant reduction of positive bias temperature instability in high-k/metal-gate nFETs by incorporation of rare earth metals

Publication type

Journal article

Embargo date

9999-12-31