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High depth resolution analysis of Si/SiGe multilayers with the atom probe
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Authors
Koelling, Sebastian
;
Gilbert, Matthieu
;
Goossens, Jozefien
;
Hikavyy, Andriy
;
Richard, Olivier
;
Vandervorst, Wilfried
ISSN
0003-6951
Issue
14
Journal
Applied Physics Letters
Volume
95
Title
High depth resolution analysis of Si/SiGe multilayers with the atom probe
Publication type
Journal article
Embargo date
9999-12-31
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