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Nanolayer characterisation by reference-free X-ray fluorescence analysis with synchrotron radiation

dc.contributor.authorKolbe, M.
dc.contributor.authorBeckhoff, B.
dc.contributor.authorKrumrey, M.
dc.contributor.authorReading, M.A.
dc.contributor.authorvan den Berg, J.A.
dc.contributor.authorConard, Thierry
dc.contributor.authorDe Gendt, Stefan
dc.date.accessioned2021-10-17T23:34:31Z
dc.date.available2021-10-17T23:34:31Z
dc.date.issued2009
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/15620
dc.sourceIIOimport
dc.titleNanolayer characterisation by reference-free X-ray fluorescence analysis with synchrotron radiation
dc.typeMeeting abstract
dc.contributor.imecauthorConard, Thierry
dc.contributor.imecauthorDe Gendt, Stefan
dc.contributor.orcidimecConard, Thierry::0000-0002-4298-5851
dc.contributor.orcidimecDe Gendt, Stefan::0000-0003-3775-3578
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage1975
dc.source.conference216th ECS Meeting
dc.source.conferencedate4/10/2009
dc.source.conferencelocationVienna Austria
imec.availabilityPublished - open access
imec.internalnotesMeeting Abstracts; Vol. MA2009-02


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