Shrinking solid-state nanopores using electron-beam induced deposition

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Authors

Kox, Ronald; Chen, Chang; Maes, Guido; Lagae, Liesbet; Borghs, Gustaaf

ISSN

0957-4484

Issue

11

Journal

Nanotechnology

Volume

20

Title

Shrinking solid-state nanopores using electron-beam induced deposition

Publication type

Journal article

Embargo date

9999-12-31

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