dc.contributor.author | Kunnen, Eddy | |
dc.contributor.author | Urbanowicz, Adam | |
dc.contributor.author | Franquet, Alexis | |
dc.contributor.author | Shamiryan, Denis | |
dc.contributor.author | Struyf, Herbert | |
dc.contributor.author | Boullart, Werner | |
dc.contributor.author | Baklanov, Mikhaïl | |
dc.date.accessioned | 2021-10-17T23:38:48Z | |
dc.date.available | 2021-10-17T23:38:48Z | |
dc.date.issued | 2009 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/15634 | |
dc.source | IIOimport | |
dc.title | Effect of energetic ions on plasma damage of SiCOH low-k material | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Franquet, Alexis | |
dc.contributor.imecauthor | Struyf, Herbert | |
dc.contributor.imecauthor | Boullart, Werner | |
dc.contributor.orcidimec | Franquet, Alexis::0000-0002-7371-8852 | |
dc.contributor.orcidimec | Boullart, Werner::0000-0001-7614-2097 | |
dc.date.embargo | 9999-12-31 | |
dc.source.peerreview | no | |
dc.source.beginpage | 12 | |
dc.source.conference | AVS 56th International Symposium and Exhibition | |
dc.source.conferencedate | 8/11/2009 | |
dc.source.conferencelocation | San Jose, CA USA | |
imec.availability | Published - open access | |