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Substrate bonding techniques for CMOS processed wafers
Publication:
Substrate bonding techniques for CMOS processed wafers
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Date
1996
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
van der Groen, Sonja
;
Rosmeulen, Maarten
;
Baert, Kris
;
Jansen, Philippe
;
Deferm, Ludo
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1910
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Acq. date: 2025-12-16
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Metrics
Views
1910
since deposited on 2021-09-29
1
last month
Acq. date: 2025-12-16
Citations