Publication:
Effect of radical scavenger and UV irradiation on removal of photoresist and BARC using water/ozone in Cu/low-k interconnect
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1836 since deposited on 2021-10-17
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Acq. date: 2026-08-09
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Statistics
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1836 since deposited on 2021-10-17
2last month
1last week
Acq. date: 2026-08-09
Citations