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High quality and low cost fabrication of virtual Ge substrates on STI patterned Si wafers

dc.contributor.authorLoo, Roger
dc.contributor.authorWang, Gang
dc.contributor.authorMitard, Jerome
dc.contributor.authorDe Jaeger, Brice
dc.contributor.authorTakeuchi, Shotaro
dc.contributor.authorEneman, Geert
dc.contributor.authorLin, Vic
dc.contributor.authorWang, Wei-E
dc.contributor.authorMeuris, Marc
dc.contributor.authorCaymax, Matty
dc.contributor.authorHeyns, Marc
dc.date.accessioned2021-10-18T00:10:34Z
dc.date.available2021-10-18T00:10:34Z
dc.date.issued2009-09
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/15742
dc.sourceIIOimport
dc.titleHigh quality and low cost fabrication of virtual Ge substrates on STI patterned Si wafers
dc.typeProceedings paper
dc.contributor.imecauthorLoo, Roger
dc.contributor.imecauthorMitard, Jerome
dc.contributor.imecauthorDe Jaeger, Brice
dc.contributor.imecauthorEneman, Geert
dc.contributor.imecauthorMeuris, Marc
dc.contributor.imecauthorCaymax, Matty
dc.contributor.imecauthorHeyns, Marc
dc.contributor.orcidimecLoo, Roger::0000-0003-3513-6058
dc.contributor.orcidimecMitard, Jerome::0000-0002-7422-079X
dc.contributor.orcidimecDe Jaeger, Brice::0000-0001-8804-7556
dc.contributor.orcidimecEneman, Geert::0000-0002-5849-3384
dc.contributor.orcidimecMeuris, Marc::0000-0002-9580-6810
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage77
dc.source.endpage78
dc.source.conference1st International Workshop on Si based Nano-Electronics and -Photonics (SiNEP-09)
dc.source.conferencedate20/09/2009
dc.source.conferencelocationVigo Spain
imec.availabilityPublished - imec


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