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High quality and low cost fabrication of virtual Ge substrates on STI patterned Si wafers
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Authors
Loo, Roger
;
Wang, Gang
;
Mitard, Jerome
;
De Jaeger, Brice
;
Takeuchi, Shotaro
;
Eneman, Geert
;
Lin, Vic
;
Wang, Wei-E
;
Meuris, Marc
;
Caymax, Matty
;
Heyns, Marc
Conference
1st International Workshop on Si based Nano-Electronics and -Photonics (SiNEP-09)
Title
High quality and low cost fabrication of virtual Ge substrates on STI patterned Si wafers
Publication type
Proceedings paper
Embargo date
9999-12-31
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