Publication:

High quality and low cost fabrication of virtual Ge substrates on STI patterned Si wafers

Date

2009-09

Proceedings Paper

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Files

18821.pdf 223.84 KB

Author(s)

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De Jaeger, Brice

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Takeuchi, Shotaro

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Statistics

1912 since deposited on 2021-10-18

Acq. date: 2026-04-26