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Conference contributions
High quality and low cost fabrication of virtual Ge substrates on STI patterned Si wafers
Publication:
High quality and low cost fabrication of virtual Ge substrates on STI patterned Si wafers
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Date
2009
Proceedings Paper
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18821.pdf
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Loo, Roger
;
Wang, Gang
;
Mitard, Jerome
;
De Jaeger, Brice
;
Takeuchi, Shotaro
;
Eneman, Geert
;
Lin, Vic
;
Wang, Wei-E
;
Meuris, Marc
;
Caymax, Matty
;
Heyns, Marc
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1912
since deposited on 2021-10-18
Acq. date: 2026-08-05
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Views
1912
since deposited on 2021-10-18
Acq. date: 2026-08-05
Citations