Publication:

High quality and low cost fabrication of virtual Ge substrates on STI patterned Si wafers

Date

2009-09
Proceedings Paper
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dc.contributor.authorLoo, Roger
dc.contributor.authorWang, Gang
dc.contributor.authorMitard, Jerome
dc.contributor.authorDe Jaeger, Brice
dc.contributor.authorTakeuchi, Shotaro
dc.contributor.authorEneman, Geert
dc.contributor.authorLin, Vic
dc.contributor.authorWang, Wei-E
dc.contributor.authorMeuris, Marc
dc.contributor.authorCaymax, Matty
dc.contributor.authorHeyns, Marc
dc.contributor.imecauthorLoo, Roger
dc.contributor.imecauthorMitard, Jerome
dc.contributor.imecauthorDe Jaeger, Brice
dc.contributor.imecauthorEneman, Geert
dc.contributor.imecauthorMeuris, Marc
dc.contributor.imecauthorCaymax, Matty
dc.contributor.imecauthorHeyns, Marc
dc.contributor.orcidimecLoo, Roger::0000-0003-3513-6058
dc.contributor.orcidimecMitard, Jerome::0000-0002-7422-079X
dc.contributor.orcidimecDe Jaeger, Brice::0000-0001-8804-7556
dc.contributor.orcidimecEneman, Geert::0000-0002-5849-3384
dc.contributor.orcidimecMeuris, Marc::0000-0002-9580-6810
dc.date.accessioned2021-10-18T00:10:34Z
dc.date.available2021-10-18T00:10:34Z
dc.date.embargo9999-12-31
dc.date.issued2009-09
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/15742
dc.source.beginpage77
dc.source.conference1st International Workshop on Si based Nano-Electronics and -Photonics (SiNEP-09)
dc.source.conferencedate20/09/2009
dc.source.conferencelocationVigo Spain
dc.source.endpage78
dc.title

High quality and low cost fabrication of virtual Ge substrates on STI patterned Si wafers

dc.typeProceedings paper
dspace.entity.typePublication
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