Authors

Loo, Roger; Wang, Gang; Souriau, Laurent; Lin, Vic; Brammertz, Guy; Caymax, Matty

Conference

216th ECS Meeting

Title

Epitaxial Ge on standard STI patterned Si wafers: high quality virtual substrates for Ge pMOS and III/V nMOS

Publication type

Meeting abstract

Embargo date

9999-12-31