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Single-layer SiGe infrared wide-band microemitter arrays by MEMS technology

dc.contributor.authorMalyutenko, Volodymyr
dc.contributor.authorMalyutenko, Oleg
dc.contributor.authorLeonov, Vladimir
dc.contributor.authorVan Hoof, Chris
dc.date.accessioned2021-10-18T00:27:45Z
dc.date.available2021-10-18T00:27:45Z
dc.date.issued2009
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/15797
dc.sourceIIOimport
dc.titleSingle-layer SiGe infrared wide-band microemitter arrays by MEMS technology
dc.typeProceedings paper
dc.contributor.imecauthorLeonov, Vladimir
dc.contributor.imecauthorVan Hoof, Chris
dc.contributor.orcidimecLeonov, Vladimir::0000-0002-4364-8945
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage73181F
dc.source.conferenceMicro- and Nanotechnology Sensors, Systems, and Applications
dc.source.conferencedate13/04/2009
dc.source.conferencelocationOrlando, FL US
imec.availabilityPublished - open access
imec.internalnotesProceedings of SPIE; Vol. 7318


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