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Interface passivation analysis of Ge/GeO2 pMOS and nMOS with and without forming gas anneal

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1847 since deposited on 2021-10-18
2last month
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Acq. date: 2026-10-13

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1847 since deposited on 2021-10-18
2last month
1last week
Acq. date: 2026-10-13

Citations