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Photonics-CMOS 3D integration: copper through-silicon-via approach
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Authors
Masood, Adil
;
Bogaerts, Wim
;
Van Olmen, Jan
;
Van Aelst, Joke
;
Van Thourhout, Dries
;
Sabuncuoglu Tezcan, Deniz
Conference
14th Annual Symposium of the IEEE Photonics Benelux Chapter
Title
Photonics-CMOS 3D integration: copper through-silicon-via approach
Publication type
Proceedings paper
Embargo date
9999-12-31
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