Authors

Menou, Nicolas; Popovici, Mihaela Ioana; Opsomer, Karl; Kaczer, Ben; Pawlak, Malgorzata; Franquet, Alexis; Detavernier, Christophe; Van Elshocht, Sven; Wouters, Dirk; Biesemans, Serge; Kittl, Jorge

Conference

International Conference on Solid State Devices and Materials - SSDM

Title

Seed layer and multistack approaches to reduce leakage in SrTiO3-based MIM capacitors using TiN bottom electrode

Publication type

Proceedings paper

Embargo date

9999-12-31