Publication:

Impact of EOT scaling down to 0.85nm on 70nm Ge-pFETs technology with STI

Date

2009
Proceedings Paper
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Author(s)

Mitard, Jerome  
;
Shea, C.
;
De Jaeger, Brice  
;
Pristera, Andrea
;
Wang, Gang
;
Houssa, Michel  
;
Eneman, Geert  
;
Hellings, Geert  
;
Wang, Wei-E
;
Lin, J.C.
;
Leys, Frederik
;
Loo, Roger  
;
Winderickx, Gillis  
;
Vrancken, Evi  
;
Stesmans, Andre  
;
De Meyer, Kristin  
;
Caymax, Matty  
;
Pantisano, Luigi
;
Meuris, Marc  
;
Heyns, Marc  

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