Authors

Molle, Alessandro; Brammertz, Guy; Lamagna, Luca; Spiga, Sabina; Meuris, Marc; Fanciulli, Marco

Conference

High-k Dielectrics on Semiconductors with High Carrier Mobility

Title

Interface quality of atomic layer deposited La-doped ZrO2 films on Ge-passivated In0.15Ga0.85As substrates

Publication type

Proceedings paper