Publication:

Interlevel dielectric engineering for improved device performance in half-micron CMOS

Date

1994

Proceedings Paper

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Files

151.pdf 162.66 KB

Author(s)

;

;

Van den Bosch, Geert

;

;

Coenegrachts, Bart

;

Van den hove, Luc

Statistics

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Acq. date: 2026-03-17